Microelectromechanical systems, and devices having thin film encapsulated mechanical structures

ABSTRACT

There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. The material that encapsulates the mechanical structures, when deposited, includes one or more of the following attributes: low tensile stress, good step coverage, maintains its integrity when subjected to subsequent processing, does not significantly and/or adversely impact the performance characteristics of the mechanical structures in the chamber (if coated with the material during deposition), and/or facilitates integration with high-performance integrated circuits. In one embodiment, the material that encapsulates the mechanical structures is, for example, silicon (polycrystalline, amorphous or porous, whether doped or undoped), silicon carbide, silicon-germanium, germanium, or gallium-arsenide.

This application is a divisional application of application Ser. No.10/454,867 (now U.S. Pat. No. 7,075,160), filed Jun. 4, 2003, thecontents of which are incorporated herein by reference.

BACKGROUND

This invention relates to electromechanical systems and techniques forfabricating microelectromechanical and nanoelectromechanical systems;and more particularly, in one aspect, to fabricating or manufacturingmicroelectromechanical and nanoelectromechanical systems with highperformance integrated circuits on a common substrate.

Microelectromechanical systems (“MEMS”), for example, gyroscopes,resonators and accelerometers, utilize micromachining techniques (i.e.,lithographic and other precision fabrication techniques) to reducemechanical components to a scale that is generally comparable tomicroelectronics. MEMS typically include a mechanical structurefabricated from or on, for example, a silicon substrate usingmicromachining techniques.

The mechanical structures are typically sealed in a chamber. Thedelicate mechanical structure may be sealed in, for example, ahermetically sealed metal container (for example, a TO-8 “can”, see, forexample, U.S. Pat. No. 6,307,815) or bonded to a semiconductor orglass-like substrate having a chamber to house, accommodate or cover themechanical structure (see, for example, U.S. Pat. Nos. 6,146,917;6,352,935; 6,477,901; and 6,507,082). In the context of the hermeticallysealed metal container, the substrate on, or in which, the mechanicalstructure resides may be disposed in and affixed to the metal container.The hermetically sealed metal container also serves as a primary packageas well.

In the context of the semiconductor or glass-like substrate packagingtechnique, the substrate of the mechanical structure may be bonded toanother substrate whereby the bonded substrates form a chamber withinwhich the mechanical structure resides. In this way, the operatingenvironment of the mechanical structure may be controlled and thestructure itself protected from, for example, inadvertent contact. Thetwo bonded substrates may or may not be the primary package for the MEMSas well.

MEMS that employ a hermetically sealed metal container or a bondedsemiconductor or glass-like substrate to protect the mechanicalstructures tend to be difficult to cost effectively integrate with highperformance integrated circuitry on the same substrate. In this regard,the additional processing required to integrate the high performanceintegrated circuitry, tends to either damage or destroy the mechanicalstructures.

Another technique for forming the chamber that protects the delicatemechanical structure employs micromachining techniques. (See, forexample, International Published Patent Applications Nos. WO 01/77008 A1and WO 01/77009 A1). In this regard, the mechanical structure isencapsulated in a chamber using a conventional oxide (SiO₂) deposited orformed using conventional techniques (i.e., oxidation using lowtemperature techniques (LTO), tetraethoxysilane (TEOS) or the like).(See, for example, WO 01/77008 A1, FIGS. 2-4). When implementing thistechnique, the mechanical structure is encapsulated prior to packagingand/or integration with integrated circuitry.

While employing a conventional oxide to encapsulate the mechanicalstructures of the MEMS may provide advantages relative to hermeticallysealed metal container or a bonded semiconductor or glass-likesubstrate, a conventional oxide, deposited using conventionaltechniques, often exhibits high tensile stress at, for example, cornersor steps (i.e., significant spatial transitions in the underlyingsurface(s)). Further, such an oxide is often formed or deposited in amanner that provides poor coverage of those areas where the underlyingsurface(s) exhibit significant spatial transitions. In addition, aconventional oxide (deposited using conventional techniques) oftenprovides an insufficient vacuum where a vacuum is desired as theenvironment in which the mechanical structures are encapsulated anddesigned to operate. These shortcomings may impact the integrity and/orperformance of the MEMS.

Moreover, a conventional oxide, deposited using conventional techniques,may produce a film on the mechanical structures during the encapsulationprocess. This film may impact the integrity of the mechanical structuresand, as such, the performance or operating characteristics of the MEMS(for example, the operating characteristics of a resonator).

There is a need for, among other things, MEMS (for example, gyroscopes,resonators, temperature sensors and/or accelerometers) that (1) overcomeone, some or all of the shortcomings of the conventional materials andtechniques and/or (2) may be efficiently integrated on a commonsubstrate with high performance integrated circuits and/or additionalMEMS.

SUMMARY OF THE INVENTION

There are many inventions described and illustrated herein. In a firstprincipal aspect, the present invention is a method of sealing a chamberof an electromechanical device having a mechanical structure disposedwithin the chamber. The method includes depositing a sacrificial layerover at least a portion of the mechanical structure and depositing afirst encapsulation layer (for example, a polycrystalline silicon,amorphous silicon, germanium, silicon/germanium or gallium arsenide)over the sacrificial layer. At least one vent is formed through thefirst encapsulation layer, and at least a portion of the sacrificiallayer is removed to form the chamber. Thereafter, a second encapsulationlayer is deposited over or in the vent to seal the chamber wherein thesecond encapsulation layer is a semiconductor material (for example,polycrystalline silicon, amorphous silicon, silicon carbide,silicon/germanium, germanium, or gallium arsenide).

In one embodiment of this aspect of the invention, the firstencapsulation layer is a semiconductor material that is doped with afirst impurity to provide a first region of a first conductivity type,and the second encapsulation layer is doped with a second impurity toprovide a second region with a second conductivity type. The firstconductivity type is opposite the second conductivity type. In oneembodiment, the first and second encapsulation layers are depositedusing an epitaxial or a CVD reactor.

The method may also include planarizing an exposed surface of the secondencapsulation layer and removing a sufficient amount of the secondencapsulation layer to thereby expose the first encapsulation layer andprovide junction isolation.

In one embodiment, a first portion of the first encapsulation layer iscomprised of a monocrystalline silicon and a second portion is comprisedof a polycrystalline silicon. In this embodiment, a surface of thesecond encapsulation layer may be planarized to expose the first portionof the first encapsulation. Thereafter, a monocrystalline silicon may begrown on the first portion of the first encapsulation.

In another principal aspect, the present invention is a method ofmanufacturing an electromechanical device having a mechanical structurethat resides in a chamber. The chamber may include a fluid having apressure that provides mechanical damping for the mechanical structure.The method comprises depositing a first encapsulation layer (comprisedof a semiconductor material, for example, polycrystalline silicon,amorphous silicon, silicon carbide, silicon/germanium, germanium, orgallium arsenide) over the mechanical structure. At least one vent isthen formed in the first encapsulation layer and the chamber is formed.Thereafter, a second encapsulation layer (comprised of a semiconductormaterial, for example, polycrystalline silicon, porous polycrystallinesilicon, amorphous silicon, silicon carbide, silicon/germanium,germanium, or gallium arsenide) is deposited over or in the vent to sealthe chamber.

In one embodiment of this aspect of the invention, the firstencapsulation layer is doped with a first impurity to provide a firstregion of a first conductivity type, and the second encapsulation layeris doped with a second impurity to provide a second region with a secondconductivity type. The first conductivity type is opposite the secondconductivity type. The first and second encapsulation layers may bedeposited using an epitaxial or a CVD reactor.

In one embodiment, a first portion of the first encapsulation layer iscomprised of a monocrystalline silicon and a second portion is comprisedof a polycrystalline silicon. In this embodiment, a surface of thesecond encapsulation layer may be planarized to expose the first portionof the first encapsulation. Thereafter, a monocrystalline silicon may begrown on the first portion of the first encapsulation.

In another principal aspect, the present invention is anelectromechanical device comprising a chamber including a firstencapsulation layer (for example, polycrystalline silicon, porouspolycrystalline silicon, amorphous silicon, germanium,silicon/germanium, gallium arsenide, silicon nitride or siliconcarbide), having at least one vent, and a mechanical structure having atleast a portion disposed in the chamber. The electromechanical devicealso includes a second encapsulation layer comprised of a semiconductormaterial (for example, polycrystalline silicon, porous polycrystallinesilicon, amorphous silicon, silicon carbide, silicon/germanium,germanium, or gallium arsenide), deposited over or in the vent, tothereby seal the chamber.

In one embodiment, the first encapsulation layer is a semiconductormaterial that is doped with a first impurity to provide a first regionof a first conductivity type. The second encapsulation layer is dopedwith a second impurity to provide a second region with a secondconductivity type. The first conductivity type is opposite the secondconductivity type.

The device may also include a contact (i.e., a conductive region, suchas the contact area and/or contact via, that is partially or whollydisposed outside of the chamber) disposed outside the chamber. Thecontact may be a semiconductor that is doped with impurities to increasethe conductivity of the area. The contact may be surrounded by thesemiconductor of the first conductivity type and the semiconductor ofthe second conductivity type, which, in combination, forms a junctionisolation.

The device of this aspect of the present invention may include a firstportion of the first encapsulation layer that is comprised of amonocrystalline silicon and a second portion is comprised of apolycrystalline silicon. In addition, the present invention may includea field region disposed outside and above the chamber wherein the fieldregion is comprised of a monocrystalline silicon.

In one embodiment, the first portion of the first encapsulation layermay be comprised of a monocrystalline silicon and a second portioncomprised of a porous or amorphous silicon. In this embodiment, thesecond encapsulation layer overlying the second portion of the firstencapsulation layer is a polycrystalline silicon.

BRIEF DESCRIPTION OF THE DRAWINGS

In the course of the detailed description to follow, reference will bemade to the attached drawings. These drawings show different aspects ofthe present invention and, where appropriate, reference numeralsillustrating like structures, components, materials and/or elements indifferent figures are labeled similarly. It is understood that variouscombinations of the structures, components, materials and/or elements,other than those specifically shown, are contemplated and are within thescope of the present invention.

FIG. 1 is a block diagram of microelectromechanical system disposed on asubstrate, in conjunction with interface circuitry and data processingelectronics;

FIG. 2 illustrates a top view of a portion of micromechanical structure,for example, or portion of the interdigitated or comb-like fingerelectrode arrays of an accelerometer, in conjunction with a contact areaand field regions;

FIG. 3 illustrates a cross-sectional view (sectioned along dotted linea-a of FIG. 2) of the portion of the interdigitated or comb-like fingerelectrode array and contact area and field regions of FIG. 2, inaccordance with certain aspects of the present invention;

FIGS. 4A-4G illustrate cross-sectional views of the fabrication of themicrostructure of FIG. 3 at various stages of the process, according tocertain aspects of the present invention;

FIGS. 5A-5C illustrate cross-sectional views of additional fabricationprocesses of the microstructure of FIG. 3, according to certain aspectsof the present invention;

FIGS. 6A-6F illustrate cross-sectional views of the fabrication of themicrostructure, according to certain aspects of the present invention,at various stages of the process;

FIGS. 7A-7C illustrate, among other things, cross-sectional views ofmore representative illustrations of the growth of single crystalstructures using non-conformal and conformal deposition, growth and/orformation techniques;

FIGS. 8A-8E illustrate cross-sectional views of the fabrication of themicrostructure at various stages of an encapsulation process where thefirst encapsulation layer is a permeable material, according to certainaspects of the present invention;

FIGS. 9A-9C illustrate a portion of the fabrication of theinterdigitated or comb-like finger electrode array microstructure ofFIG. 2, sectioned along dotted line a-a, in accordance with anotheraspect of the present invention including implementation of three ormore encapsulation layers (FIG. 9A) and contact interconnect (FIG. 9C);

FIGS. 10A-10F illustrate cross-sectional views of the fabrication of themicrostructure, according to certain aspects of the present invention,at various stages of the process;

FIG. 11A illustrates a cross-sectional view of a portion of a pluralityof micromechanical structures, each having one or more electromechanicalsystems, which are monolithically integrated on or within the substrateof a MEMS, in accordance with certain aspect of the present invention;

FIGS. 11B-11D illustrate cross-sectional views of a portion of amicromechanical structure, having a plurality of microstructures, whichare monolithically integrated on or within the substrate of a MEMS, inaccordance with certain aspect of the present invention

FIGS. 12A-12C illustrate cross-sectional views of MEMS, according tocertain aspects of the present inventions, including a micromachinedmechanical structure portion and an integrated circuit portion, bothportions of which are disposed or integrated on a common substrate; and

FIG. 13 illustrates a cross-sectional view of a portion of amicromachined micromechanical structure, having a microstructure, whichincludes a layer of the second encapsulation layer deposited thereon.

DETAILED DESCRIPTION

There are many inventions described and illustrated herein. In oneaspect, the present invention is directed to a MEMS device, andtechnique of fabricating or manufacturing a MEMS device, havingmechanical structures encapsulated in a chamber prior to final packagingand/or completion of the device. The material that encapsulates themechanical structures may include one or more of the followingattributes: low tensile stress, good step coverage, maintains integritywhen subjected to subsequent processing, does not significantly and/oradversely affect the performance characteristics of the mechanicalstructures (if coated with the material during its deposition, formationand/or growth) within the chamber, maintains designed, appropriateand/or suitable encapsulation attributes over operating conditionsand/or time, and/or facilitates integration with high-performanceintegrated circuits. In one embodiment, the mechanical structures areencapsulated by a semiconductor material, for example, silicon (forexample, monocrystalline silicon, polycrystalline silicon, amorphoussilicon or porous polycrystalline silicon, whether doped or undoped),germanium, silicon-germanium, silicon carbide or gallium arsenide, orcombinations thereof. Such materials may maintain one or more of thefollowing attributes over typical operating conditions and the lifetimeof the MEMS.

With reference to FIG. 1, in one exemplary embodiment, a MEMS 10includes a micromachined mechanical structure 12 that is disposed onsubstrate 14, for example, an undoped semiconductor-like material, aglass-like material, or an insulator-like material. The MEMS 10 may alsoinclude data processing electronics 16, to process and analyzeinformation generated by, and/or control or monitor the micromachinedmechanical structure 12. In addition, MEMS 10 may also include interfacecircuitry 18 to provide the information from micromachined mechanicalstructure 12 and/or data processing electronics 16 to an external device(not illustrated), for example, a computer, indicator/display and/orsensor.

The data processing electronics 16 and/or interface circuitry 18 may beintegrated in or on substrate 14. In this regard, MEMS 10 may be amonolithic structure including mechanical structure 12, data processingelectronics 16 and interface circuitry 18. The data processingelectronics 16 and/or interface circuitry 18 may also reside on aseparate, discrete substrate that, after fabrication, is bonded to or onsubstrate 14.

With reference to FIG. 2, in one embodiment, micromachined mechanicalstructure 12 includes mechanical structures 20 a-d disposed on, aboveand/or in substrate 14. The mechanical structures 20 a-20 d may becomprised of, for example, materials in column IV of the periodic table,for example silicon, germanium, carbon; also combinations of these, forexample silicon germanium, or silicon carbide; also of III-V compoundsfor example gallium phosphide, aluminum gallium phosphide, or otherIII-V combinations; also combinations of III, IV, V, or VI materials,for example silicon nitride, silicon oxide, aluminum carbide, oraluminum oxide; also metallic silicides, germanides, and carbides, forexample nickel silicide, cobalt silicide, tungsten carbide, or platinumgermanium silicide; also doped variations including phosphorus, arsenic,antimony, boron, or aluminum doped silicon or germanium, carbon, orcombinations like silicon germanium; also these materials with variouscrystal structures, including single crystalline, polycrystalline,nanocrystalline, or amorphous; also with combinations of crystalstructures, for instance with regions of single crystalline andpolycrystalline structure (whether doped or undoped).

Moreover, the micromachined mechanical structure 12 may be anaccelerometer, gyroscope or other transducer (for example, pressuresensor, strain sensor, tactile sensor, magnetic sensor and/ortemperature sensor), or resonator. The micromachined mechanicalstructure 12 may also include mechanical structures of a plurality oftransducers or sensors including one or more accelerometers, gyroscopes,pressure sensors, tactile sensors and temperature sensors. Wheremicromachined mechanical structure 12 is an accelerometer, mechanicalstructures 20 a-d may be a portion of the interdigitated or comb-likefinger electrode arrays that comprise the sensing features of theaccelerometer (See, for example, U.S. Pat. No. 6,122,964).

With continued reference to FIG. 2, field regions 22 a and 22 b andcontact area 24 are also disposed on or in substrate 14. The fieldregions 22 may provide a substrate material for the electronic orelectrical components or integrated circuits (for example, transistors,resistors, capacitors, inductors and other passive or active elements)of data processing electronics 16 and/or interface circuitry 18. Thecontact area 24 may provide an electrical path between micromachinedmechanical structure 12 and data processing electronics 16, interfacecircuitry 18 and/or an external device (not illustrated). The fieldregions 22 and contact area 24 may be comprised of, for example, silicon(whether doped or undoped), germanium, silicon/germanium, siliconcarbide, and gallium arsenide.

FIG. 3 illustrates a cross-sectional view of micromachined mechanicalstructure 12, including mechanical structures 20 a-d, along dotted linea-a′, in accordance with one embodiment of the present invention. Themechanical structures 20 a-d are disposed within chamber 26. In oneembodiment, chamber 26 is sealed or encapsulated via encapsulatinglayers 28 a and 28 b.

The encapsulating layers 28 a and 28 b may be comprised of, for example,a semiconductor. In one embodiment, encapsulating layers 28 a and 28 bmay contain silicon (for example, monocrystalline silicon,polycrystalline silicon, amorphous silicon or porous polycrystallinesilicon, whether doped or undoped), germanium, silicon/germanium,silicon carbide, and gallium arsenide (and combinations thereof). Theencapsulating layers 28 a and 28 b may be the same materials ordifferent materials.

The encapsulating layers 28 a and 28 b may be deposited, formed and/orgrown using the same or different techniques. For example, encapsulatinglayer 28 a may be a polycrystalline silicon deposited using a lowpressure (“LP”) chemically vapor deposited (“CVD”) process (in a tube orEPI reactor) or plasma enhanced (“PE”) CVD process and encapsulatinglayer 28 b may be a doped polycrystalline silicon deposited using anatmospheric pressure (“AP”) CVD process. Alternatively, for example,encapsulating layer 28 a may be a silicon germanium deposited using aLPCVD process and encapsulating layer 28 b may be doped polycrystallinesilicon deposited using a PECVD process. Indeed, all semiconductormaterials and deposition techniques, and permutations thereof, forencapsulating chamber 26, whether now known or later developed, areintended to be within the scope of the present invention.

It should be noted that the mechanical structures of one or moretransducers or sensors (for example, accelerometers, gyroscopes,pressure sensors, tactile sensors and/or temperature sensors) may becontained or reside in a single chamber and exposed to an environmentwithin that chamber. Under this circumstance, the environment containedin chamber 26 provides a mechanical damping for the mechanicalstructures of one or more micromachined mechanical structures (forexample, an accelerometer, a pressure sensor, a tactile sensor and/ortemperature sensor).

Moreover, the mechanical structures of the one or more transducers orsensors may themselves include multiple layers that are verticallyand/or laterally stacked or interconnected. (See, for example,micromachined mechanical structure 12 b of FIG. 11A; mechanicalstructure 12 of FIGS. 11B and 11C; and mechanical structures 20 a and 20b, contact areas 24 a and 24 b, and buried contacts 24′ and 24″ of FIG.11D). Thus, under this circumstance, the mechanical structures arefabricated using one or more processing steps to provide the verticallyand/or laterally stacked and/or interconnected multiple layers.

With reference to FIGS. 4A and 4B, an exemplary method of fabricating ormanufacturing a micromachined mechanical structure 12 may begin with apartially formed device including mechanical structures 20 a-d andcontact area 24 disposed on first sacrificial layer 30, for example,silicon dioxide or silicon nitride. Mechanical structures 20 a-d andcontact area 24 may be formed using well-known deposition, lithographic,etching and/or doping techniques as well as from well-known materials(for example, semiconductors such as silicon, germanium,silicon-germanium or gallium-arsenide). Moreover, field regions 22 a and22 b and first sacrificial layer 30 may be formed using well-knownsilicon-on-insulator fabrication techniques (FIG. 4A) or well-knownformation, lithographic, etching and/or deposition techniques using astandard or over-sized (“thick”) wafer (FIG. 4B). Notably, field regions22 a and 22 b, mechanical structures 20 and contact area 24 may becomprised of single or monocrystalline structures (for example,monocrystalline silicon) as illustrated in FIG. 4A, polycrystallinestructures, or both monocrystalline and polycrystalline structures asillustrated in FIG. 4B (i.e., field regions 22 a and 22 b are comprisedof single or monocrystalline structures, for example, monocrystallinesilicon, and mechanical structures 20 and contact area 24 may becomprised of polycrystalline structures, for example, polycrystallinesilicon. Indeed, all techniques, materials and crystal structures forcreating a partially formed device including mechanical structures 20a-d and contact area 24 disposed on first sacrificial layer 30, whethernow known or later developed, are intended to be within the scope of thepresent invention.

With reference to FIG. 4C, following formation of mechanical structures20 a-d and contact area 24, a second sacrificial layer 32, for example,silicon dioxide or silicon nitride, may be deposited and/or formed tosecure, space and/or protect mechanical structures 20 a-d duringsubsequent processing, including the encapsulation process. In addition,an opening 34 may be etched or formed into second sacrificial layer 32to provide for subsequent formation of an electrical contact. Theopening 34 may be provided using, for example, well known maskingtechniques (such as a nitride mask) prior to and during depositionand/or formation of second sacrificial layer 32, and/or well knownlithographic and etching techniques after deposition and/or formation ofsecond sacrificial layer 32.

With reference to FIGS. 4D, 4E and 4F, thereafter, first encapsulationlayer 28 a may be deposited, formed and/or grown on second sacrificiallayer 32 (see, FIG. 4D). In one embodiment, the thickness of firstencapsulation layer 28 a in the region overlying second sacrificiallayer 32 may be between 1 μm and 25 μm. The external environmentalstress on, and internal stress of first encapsulation layer 28 a afteretching second sacrificial layer 32 may impact the thickness of firstencapsulation layer 28 a. Slightly tensile films may self-support betterthan compressive films which may buckle.

The first encapsulation layer 28 a may be etched to form passages orvents 36 (see, FIG. 4E). In one exemplary embodiment, the vents have adiameter or aperture size of between 0.1 μm to 2 μm.

The vents 36 are intended to permit etching and/or removal of at leastselected portions of first and second sacrificial layers 30 and 32,respectively (see, FIG. 4F). For example, in one embodiment, where firstand second sacrificial layers 30 and 32 are comprised of silicondioxide, selected portions of layers 32 and 32 may be removed/etchedusing well known wet etching techniques and buffered HF mixtures (i.e.,a buffered oxide etch) or well known vapor etching techniques usingvapor HF. Proper design of mechanical structures 20 a-d and sacrificiallayers 30 and 32, and control of the HF etching process parameters maypermit the sacrificial layer 30 to be sufficiently etched to remove allor substantially all of layer 30 around mechanical elements 20 a-d andthereby release elements 20 a-d to permit proper operation of MEMS 10.

In another embodiment, where first and second sacrificial layers 30 and32 are comprised of silicon nitride, selected portions of layers 30 and32 may be removed/etched using phosphoric acid. Again, proper design ofmechanical structures 20 a-d and sacrificial layers 30 and 32, andcontrol of the wet etching process parameters may permit the sacrificiallayer 30 to be sufficiently etched to remove all or substantially all ofsacrificial layer 30 around mechanical elements 20 a-d which willrelease mechanical elements 20 a-d.

It should be noted that there are: (1) many suitable materials forlayers 30 and/or 32 (for example, silicon dioxide, silicon nitride, anddoped and undoped glass-like materials, e.g., phosphosilicate (“PSG”) orborophosphosilicate (“BPSG”)) and spin on glass (“SOG”)), (2) manysuitable/associated etchants (for example, a buffered oxide etch,phosphoric acid, and alkali hydroxides such as, for example, NaOH andKOH), and (3) many suitable etching or removal techniques (for example,wet, plasma, vapor or dry etching), to eliminate, remove and/or etchsacrificial layers 30 and/or 32. Indeed, layers 30 and/or 32 may be adoped or undoped semiconductor (for example, polycrystalline silicon,silicon/germanium or germanium) in those instances where mechanicalstructures 20 a-d and contact area 24 are the same or similarsemiconductors (i.e., processed, etched or removed similarly) providedthat mechanical structures 20 a-d and contact area 24 are not adverselyaffected by the etching or removal processes (for example, wherestructures 20 a-d and area 24 are “protected” during the etch or removalprocess (e.g., an oxide layer protecting a silicon based structures 20a-d) or where structures 20 a-d and contact area 24 are comprised of amaterial that is adversely affected by the etching or removal process oflayers 30 and/or 32). Accordingly, all materials, etchants and etchtechniques, and permutations thereof, for eliminating, removing and/oretching, whether now known or later developed, are intended to be withinthe scope of the present invention.

It should be further noted that, in certain embodiments, in addition toforming vents 36, the etching process of first encapsulation layer 28 aalso forms contact via 38 (see, FIG. 4F) to facilitate electricalcontinuity from electrical contact area 24 to a level to or above firstencapsulation layer 28 a. In this way, additional processing may beavoided, eliminated and/or minimized, for example, processing related toremoval of the portion of first encapsulation layer 28 a overlyingelectrical contact area 24 and deposition, formation and/or growth of asuitable material (to provide adequate electrical contact between thevarious layers of MEMS 10, for example, monocrystalline silicon).Indeed, the resistivity or conductivity of contact via 38 may beadjusted (for example, resistivity reduced and/or conductivity enhanced)using well-known impurity implantation techniques.

Moreover, contact 24 may remain partially, substantially or entirelysurrounded by first and second sacrificial layers 30 and/or 32. Forexample, with reference to FIG. 4F, while mechanical structures 20 a-dare released from their respective underlying oxide columns, a column 40of sacrificial layer 30 beneath or underlying electrical contact area 24may provide additional physical support as well as electrical isolationfor electrical contact area 24.

With reference to FIG. 4G, after releasing mechanical elements 20 a-d, asecond encapsulation layer 28 b may be deposited, formed and/or grown.The second encapsulation layer 28 b may be, for example, a silicon-basedmaterial (for example, a polycrystalline silicon or silicon-germanium),which is deposited using, for example, an epitaxial, a sputtering or aCVD-based reactor (for example, APCVD, LPCVD, or PECVD). The deposition,formation and/or growth may be by a conformal process or non-conformalprocess. The material may be the same as or different from firstencapsulation layer 28 a. However, it may be advantageous to employ thesame material to form first and second encapsulation layers 28 a and 28b. In this way, for example, the thermal expansion rates are the sameand the boundaries between layers 28 a and 28 b may enhance the “seal”of chamber 26.

In one embodiment, second encapsulation layer 28 b may be epitaxiallydeposited using an epitaxy reactor and conditions similar toconventional selective epitaxial silicon growth. This may be in asilane, dichlorosilane, or trichlorosilane process with H₂, and/or HClgases. These processes may typically be run from 600° C. to 1400° C.

In one embodiment, the thickness of second encapsulation layer 28 b inthe region overlying second first encapsulation layer and elements 20a-d may be between 1 μm and 10 μm. Indeed, as MEMS 10, includingmechanical structure 12, scale over time and various and/or differentmaterials are implemented, the suitable or necessary thicknesses offirst encapsulation layer 28 a, second encapsulation layer 28 b andcombination thereof are likely to change. As such, a ratio of about 1:1to 1:10 between thicknesses of first encapsulation layer 28 a and secondencapsulation layer 28 b may be advantageous. It is noted, however, thatother ratios and thicknesses are clearly suitable (see, for example,FIGS. 7A, 7B, and 8A-E).

The second encapsulation layer 28 b may doped with impurities having anopposite conductivity relative to the impurities in first encapsulationlayer 28 a. For example, first encapsulation layer 28 a may be dopedwith boron and second encapsulation layer 28 b may be doped withphosphorous. In this way, upon completion of the sealing orencapsulation process, junctions surrounding electrical contact area 24are formed which electrically “isolate” contact area 24 from, forexample, field region 22 b.

It should be noted that portions of second encapsulation layer 28 b aredisposed near, next to and/or around contact area 24 may also besubjected to ion implantation after deposition, formation and/or growth.In that way, the electrical “isolation” may be increased or enhanced. Inthose instances where second encapsulation layer 28 b is depositedand/or formed without impurity dopants, the ion implantation may provideprimary, all or substantially all of the electrical isolation betweencontact area 24 and, for example, field region 22 b. Indeed, in thoseinstances where second encapsulation layer 28 b extends over or betweenfield regions (thereby providing electrical connection there between),the ion implantation of portions of second encapsulation layer 28 b(whether doping or counter-doping of a doped second encapsulation layer28 b) that are disposed near, next to and/or around contact area 24 mayprovide all or substantially all of the electrical isolation betweencontact area 24 and, for example, field region 22 b.

With reference to FIG. 5A, in another set of embodiments, micromachinedmechanical structure 12 may be substantially planarized using, forexample, polishing techniques (for example, chemical mechanicalpolishing (“CMP”)). In this regard, where second encapsulation layer 28b is deposited, formed and/or grown to a level that exceeds firstencapsulation layer 28 a (see, for example, FIG. 4G), the planarizationprocess removes a portion of second encapsulation layer 28 b to providea “smooth” surface layer and/or (substantially) planar surface. It maybe advantageous to remove a sufficient amount of second encapsulationlayer 28 b so that contact via 38 is electrically isolated by oppositelydoped semiconductor layer 28 b (See, FIG. 5A) relative to the firstencapsulation layer 28 a. This exposed planar surface may furtherprovide a well-prepared base (in, for example, field regions 22) uponwhich integrated circuits (for example, CMOS transistors) and/ormicromachined mechanical structure 12 may be fabricated on or in usingwell known fabrication techniques and equipment.

To facilitate integration of high performance integrated circuits inMEMS 10, it may be advantageous to include field regions 22 a and/or 22b that are comprised of monocrystalline silicon in or on which suchcircuits may be fabricated. In this regard, with reference to FIG. 5B,in one embodiment, a portion of first encapsulation layer (i.e., 22 a ₂and 22 b ₂) overlying field regions 22 a ₁ and/or 22 b ₁ may berecrystalized thereby “converting” or re-arranging the crystal structureof the polycrystalline material to that of a monocrystalline orsubstantially monocrystalline material. In this way, transistors orother components of, for example, data processing electronics 16, thatare integrated in MEMS 10 may be fabricated in monocrystalline fieldregions.

In another embodiment, the portion of first encapsulation layer 28 aoverlying field regions 22 a ₁ and/or 22 b ₁ may be removed, usingconventional etching techniques, to expose field regions 22 a ₁ and/or22 b ₁. Thereafter, monocrystalline silicon may be grown on fieldregions 22 a ₁ and/or 22 b ₁ to thereby provide field regions 22 a ₂and/or 22 b ₂.

In yet another embodiment, the portion of first encapsulation layer 28 aoverlying field regions 22 a ₁ and/or 22 b ₁ may be etched to exposefield regions 22 a ₁ and/or 22 b ₁, which are comprised ofmonocrystalline silicon. Thereafter, transistors or other activecomponents may be integrated in or on field regions 22 a and/or 22 busing well-known fabrication techniques.

With reference to FIGS. 6A-F, in another set of embodiments, themonocrystalline field regions 22 a ₂ and 22 b ₂ may be grown before,concurrently (simultaneously) or shortly after deposition, formationand/or growth of first encapsulation layer 28 a. For example, withreference to FIG. 6A, before or after deposition or formation of secondsacrificial layer 32, an epitaxially deposited encapsulation layer ofmonocrystalline silicon field regions 22 a ₂ and 22 b ₂ may be grown toa level that is above or exceeds second sacrificial layer 32.Alternatively, monocrystalline silicon field regions 22 a ₂ and 22 b ₂are not grown to a level that is above or exceeds second sacrificiallayer 32 (not illustrated).

With reference to FIG. 6B, in one embodiment, after growingmonocrystalline silicon field regions 22 a ₂ and 22 b ₂ (and contactarea 24), first encapsulation layer 28 a may be deposited, formed and/orgrown. The first encapsulation layer 28 a may be, for example, asilicon-based material (for example, silicon/germanium, silicon carbide,monocrystalline silicon, polycrystalline silicon or amorphous silicon,whether doped or undoped), germanium, and gallium arsenide (andcombinations thereof, which is deposited and/or formed using, forexample, an epitaxial, a sputtering or a CVD-based reactor (for example,APCVD, LPCVD, or PECVD). The deposition, formation and/or growth may beby a conformal process or non-conformal process. The material may be thesame as or different from first monocrystalline silicon field regions 22a ₂ and 22 b ₂. In the illustrated embodiment, first encapsulation layer28 a is comprised of a polycrystalline silicon material.

The subsequent processing of micromachined mechanical structure 12 issubstantially similar to that described above with respect to FIGS.4E-4G. As such, the discussion above with respect to micromachinedmechanical structure 12, in conjunction with FIGS. 4E-4G, is entirely,fully and completely applicable to this set of embodiments. For the sakeof brevity, that description will not be repeated but rather will besummarized.

Briefly, first encapsulation layer 28 a may be etched (see, FIG. 6C) toform passages or vents 36 that are intended to permit etching and/orremoval of at least selected portions of first and second sacrificiallayers 30 and 32, respectively (see, FIG. 6D). Again, proper design ofmechanical structures 20 a-d and sacrificial layers 30 and 32, andcontrol of the etch process parameters may permit the sacrificial layer30 to be sufficiently etched to remove all or substantially all of layer30 around mechanical elements 20 a-d and thereby release mechanicalelements 20 a-d to permit proper operation of MEMS 10 (see, FIG. 6D).

After releasing mechanical elements 20 a-d, second encapsulation layer28 b may be deposited, formed and/or grown (see, FIG. 6E). The secondencapsulation layer 28 b may be, for example, a silicon-based material(for example, a monocrystalline silicon, polycrystalline silicon and/orsilicon-germanium), which is deposited using, for example, an epitaxial,a sputtering or a CVD-based reactor (for example, APCVD, LPCVD, orPECVD). The deposition, formation and/or growth may be by a conformalprocess or non-conformal process. The material may be the same as ordifferent from first encapsulation layer 28 a. As mentioned above,however, it may be advantageous to employ the same material to formfirst and second encapsulation layers 28 a and 28 b in order to enhancethe “seal” of chamber 26.

It should be noted that the materials and/or surfaces underlying secondencapsulation layer 28 b, as well as the techniques employed to deposit,form and/or grow first and second encapsulation layer 28 b, mayinitially determine the crystalline structure of the underlyingmaterial. For example, in an epitaxial environment having apredetermined set of parameters, the single/mono crystalline structureof encapsulation layers 28 a and/or 28 b may deposit, form and/or growin a “retreating” manner (see, FIG. 7A). In contrast, with anotherpredetermined set of parameters, the single/mono crystalline structureof encapsulation layers 28 a and/or 28 b may deposit, form and/or growin an “advancing” manner (see, FIG. 78). The structures and elementsherein may be deposited, formed and/or grown in these or other manners.Accordingly, the single/mono crystalline structure (for example, fieldregion 22 a ₂ and contact area 24 a ₂) that is deposited, formed and/orgrown on a material having single/mono crystalline structure (forexample, field region 22 a ₁ and contact area 24 a ₁) is illustratedschematically as depositing, forming and/or growing in the perpendiculardirection (see, for example, FIG. 7C) regardless of the manner orprocesses of employed.

It should be further noted that the material comprising secondencapsulation layer 28 b may deposit, form or grow over surfaces inchamber 26 (for example, the surfaces of mechanical structures 20 a-d)as the chamber is sealed or encapsulated. When depositing, formingand/or growing second encapsulation layer 28 b, care may need to betaken to preserve the desired integrity of the structures and/orsurfaces within chamber 26 (see, for example, FIG. 13).

As mentioned above, in certain embodiments, second encapsulation layer28 b is doped with impurities having an opposite conductivity relativeto the impurities in first encapsulation layer 28 a. In this way, uponcompletion of the sealing or encapsulation process, junctionssurrounding electrical contact area 24 are formed which electrically“isolate” contact area 24 from, for example, field region 22 b.

Further, as mentioned above, in another set of embodiments, where secondencapsulation layer 28 b is deposited, formed and/or grown to a levelthat exceeds first encapsulation layer 28 a, it may be advantageous tosubstantially planarized the exposed surface using, for example,polishing techniques (for example, CMP). The planarization processremoves a portion of second encapsulation layer 28 b to provide a“smooth” surface layer and/or (substantially) planar surface. Indeed,the planarization process may remove a sufficient portion of secondencapsulation layer 28 b so that contact via 38 is electrically isolatedby a ring of oppositely doped semiconductor layer 28 b (See, FIG. 6F).Again, as mentioned above, this exposed planar surface may furtherprovide a well-prepared base upon which integrated circuits (forexample, CMOS transistors) and/or micromachined mechanical structure 12may be fabricated on or in using well known fabrication techniques andequipment.

As illustrated, monocrystalline silicon field region 22 b ₂ grow on andabove contact area 24. In another embodiment, field region 22 b ₂ doesnot grow on or over contact area 24. In this embodiment, contact via 38is comprised primarily of polycrystalline silicon rather thanmonocrystalline silicon. Moreover, as described above, contact via 38may be doped with impurities to enhance the conductivity of the materialcomprising contact via 38.

With reference to FIGS. 8A-E, in another set of embodiments, firstencapsulation layer 28 a may be a permeable or semi-permeable material(for example, an amorphous sputtered silicon or porous CVD and/orepitaxial deposited polycrystalline silicon). In this set ofembodiments, the process of etching or removing layers 30 and 32 may beperformed through the permeable or semi-permeable material comprisinglayer 28 a. Thereafter, when depositing, forming and/or growing secondencapsulation layer 28 b (for example, polycrystalline silicon) on firstencapsulation layer 28 a, the material may migrate to, fill and/oroccupy the pores of first encapsulation layer 28 a. Under thiscircumstance, relatively little material may deposit on the surfaces ofthe structures within chamber 26 during deposition, formation and/orgrowth of second encapsulation layer 28 b. As such, chamber 26 may be“sealed” or encapsulated towards the upper surfaces of firstencapsulation layer 28 a (i.e., the surface that are first exposed tothe deposition, formation and/or growth process—see, for example, FIG.8D).

For example, in one embodiment, where the permeable or semi-permeablematerial is an amorphous sputtered silicon or porous CVD depositedpolycrystalline silicon, having a thickness of between 0.1 μm and 2 μm.After etching and/or removal of layers 30 and 32, second encapsulationlayer 28 b may be a thickness of between 5 μm and 25 μm.

With reference to FIG. 8C, the material comprised of first encapsulationlayer 28 a may also be densified and thereby “closed” and chamber 26“sealed” using an annealing process. That is, in this embodiment, heattreating micromachined mechanical structure 12, after etching first andsecond sacrificial layers 30 and 32, may cause the material of layer 28a to densify thereby sealing or encapsulating chamber 26. As such, asecond encapsulation layer 28 b may not be necessary to initially sealchamber 26.

With reference to FIG. 8E, in one embodiment, the encapsulation processof chamber 26 may include three or more encapsulation layers. The secondencapsulation layer 28 b and third encapsulation layer 28C (orsubsequent/additional layers) may be deposited, formed and/or grown to“seal” chamber 26. In particular, second encapsulation layer 28 b maybe, for example, a semiconductor material (for example, silicon, siliconcarbide, silicon-germanium or germanium) or metal bearing material (forexample, suicides or TiW), which is deposited using, for example, anepitaxial, a sputtering or a CVD-based reactor (for example, APCVD,LPCVD or PECVD). The deposition, formation and/or growth may be by aconformal process or non-conformal process. The material comprisingencapsulation layer 28 b may be the same as or different from firstencapsulation layer 28 a.

Thereafter, third encapsulation layer 28 c may be deposited, formedand/or grown (see, FIG. 8E). The third encapsulation layer 28 c may“seal” or close, or more fully “seal” or close chamber 26. Thedeposition, formation and/or growth of third encapsulation layer 28 cmay be the same as, substantially similar to, or different from that ofencapsulation layers 28 a and/or 28 b. In this regard, thirdencapsulation layer 28 c may be comprised of, for example, asemiconductor material, an insulator material (for example, siliconnitride or silicon oxide), plastic (for example, photo resist or low-Kdielectric) or metal bearing material. The third encapsulation layer 28c may be deposited and/or formed using, for example, an epitaxial, asputtering or a CVD-based reactor (for example, APCVD, LPCVD or PECVD).The deposition, formation and/or growth process may be conformal ornon-conformal.

It should be noted that the techniques described above to facilitateintegration of high performance integrated circuits in MEMS 10, may beimplemented with the embodiment illustrated in FIGS. 8A-8E. In thisregard, it may be advantageous to include field region 22 a that iscomprised of monocrystalline silicon in or on which such circuits may befabricated. In one embodiment, a portion of first encapsulation layeroverlying field region 22 a may be recrystalized thereby “converting” orre-arranging the crystal structure of the amorphous sputtered silicon orporous CVD and/or epitaxial deposited polycrystalline silicon to that ofa monocrystalline or substantially monocrystalline material. In thisway, transistors or other components of, for example, data processingelectronics 16, that are integrated in MEMS 10 may be fabricated inmonocrystalline field regions 22 a and/or 22 b.

In another embodiment, the portion of first encapsulation layer 28 a(and/or second encapsulation layer 28 b) overlying field region 22 a maybe removed, using conventional etching techniques, to expose fieldregion 22 a. Thereafter, monocrystalline silicon may be grown on fieldregion 22 a. Alternatively, the portion of first encapsulation layer 28a (and second encapsulation layer 28 b) overlying field region 22 a maybe etched to expose the single crystal material and, thereaftertransistors or other active components may be integrated in or on fieldregion 22 a using well-known fabrication techniques.

It should be further noted that encapsulation layer 28 c (see, forexample, FIG. 8E and FIG. 9A) may be deposited, formed and/or grown to,for example, provide a more planar surface, an etch stop layer forsubsequent processing, an insulation layer, a ground plane, a powerplane, and/or enhance the “seal” of chamber 26 and thereby enhance thebarrier to diffusion of fluid 42. For example, with reference to FIGS.9A-C, layer 28 c may be an insulation layer which, in addition (or inlieu thereof) facilitates suitable interconnection with contact area 24and contact via or plug 38 (for example, using a highly dopedpolysilicon or metal layer). Thereafter (or currently therewith), layer28 c is patterned to provide contact opening 44 (FIG. 9B). A highlyconductive (low electrical resistance) material (for example, a heavilydoped semiconductor and/or a metal such as aluminum, chromium, gold,silver, molybdenum, platinum, palladium, tungsten, titanium, and/orcopper) may then be deposited to facilitate interconnection (FIG. 9C).

It should be noted that deposition, formation and/or growth ofinsulation layer 28 c and layer 46 may be two of the final process stepin the “back-end” of the integrated circuit fabrication of MEMS 10. Inthis regard, such processing is “combined” with the insulating andcontact formation step of the “back-end” of the integrated circuitfabrication of MEMS 10. In this way, fabrication costs may be reduced.

Depending upon the purpose or function of encapsulation layer 28 c, itmay be, for example, a semiconductor material (for example, apolycrystalline silicon, silicon carbide, silicon/germanium orgermanium), an insulator material (for example, silicon dioxide, siliconnitride, BPSG, PSG, or SOG) or metal bearing material (for example,silicides). The encapsulation layer 28 c may be, for example, deposited,formed or grown using, for example, an epitaxial, a sputtering or aCVD-based reactor (for example, APCVD, LPCVD or PECVD). The deposition,formation and/or growth may be by a conformal process or non-conformalprocess. The material comprising encapsulation layer 28 c may be thesame as or different from the other encapsulation layers.

In another set of embodiments, second encapsulation layer 28 b may becomprised of metal (for example, aluminum, chromium, gold, silver,molybdenum, platinum, palladium, tungsten, titanium, and/or copper),metal oxide (for example, aluminum oxide, tantalum oxide, and/or indiumoxide), metal alloy (for example, titanium-nitride, titanium-tungstenand/or Al—Si—Cu) and/or metal-silicon compound (for example, suicidessuch as tungsten silicide, titanium silicide, and/or nickel silicide)(hereinafter, collectively called “metal bearing material(s)”) depositedand/or formed using, for example, an epitaxial, a sputtering or aCVD-based reactor (for example, APCVD, LPCVD, or PECVD). In this set ofembodiments, first encapsulation layer 28 a may be comprised of metalbearing material, semiconductor material or insulator material depositedand/or formed using, for example, an epitaxial, a sputtering or aCVD-based reactor (for example, APCVD, LPCVD, or PECVD).

For example, with reference to FIG. 10A, after formation of theintegrated circuit portion of MEMS 10 (if any), first encapsulationlayer 28 a is deposited, grown and/or formed on second sacrificial layer32 (see, FIG. 10A) while selected portions of field region 22 andcontact area 24 are protected via a mask or re-exposed by etching. Thefirst encapsulation layer 28 a may be, for example, an insulatormaterial (for example, a silicon nitride, silicon dioxide, PSG or BPSG),which is deposited using, for example, an epitaxial, a sputtering or aCVD-based reactor (for example, APCVD, LPCVD, or PECVD). The deposition,formation and/or growth may be by a conformal process or non-conformalprocess. Indeed, deposition, formation and/or growth of firstencapsulation layer 28 a may be a process step in the “back-end” of theintegrated circuit fabrication of MEMS 10.

Thereafter, first encapsulation layer 28 a may be etched to formpassages or vents 36 (see, FIG. 10B). At least selected portions offirst and second sacrificial layers 30 and 32, respectively, (see, FIG.10C) which releases mechanical elements 20 a-d to permit properoperation of MEMS 10.

After releasing mechanical elements 20 a-d, second encapsulation layer28 b may be deposited, formed and/or grown (see, FIG. 10D). In thisembodiment, second encapsulation layer 28 b is metal bearing materialthat is deposited using, for example, an epitaxial, a sputtering or aCVD-based reactor (for example, APCVD, LPCVD, or PECVD). The depositionand/or formation may be by a conformal process or non-conformal process.The deposition, formation and/or growth of second encapsulation layer 28b may also be “combined” with the contact formation step of the“back-end” of the integrated circuit fabrication of MEMS 10. In thisway, fabrication costs may be reduced.

Thereafter, it may be advantageous to electrically “isolate” contactarea 24 from, for example, field region 22. In one embodiment, this isaccomplished using a planarization technique. In this regard, theexposed surface of second encapsulation layer 28 b is substantiallyplanarized using, for example, polishing techniques (for example, CMP).The planarization process removes a sufficient portion of secondencapsulation layer 28 b to electrically isolated contact area 24 (see,FIG. 10E). In another embodiment, selected portions of secondencapsulation layer 28 b may be etched (see, FIG. 10F).

It should be noted that the portion of second encapsulation layer 28 aoverlying field region 22 may be removed, using conventional etchingtechniques, to expose field region 22 (see, FIG. 9E). In this way,monocrystalline silicon may be grown and/or formed on field region 22.Thereafter, transistors or other active components may be integrated inor on MEMS 10 using well-known fabrication techniques.

Indeed, in those situations where first encapsulation layer 28 a isdeposited, formed and/or grown over field region 22 and/or contact area24 without the use of a mask, selected portions of first encapsulationlayer 28 a that overlying field are 22 and/or contact area 24 may beetched to expose portions and the monocrystalline silicon. Thereafter,monocrystalline silicon may be grown permitting integration oftransistors or other active components as described above.

It should be further noted that the environment (for example, the gas orgas vapor pressure) within chamber 26 determines to some extent themechanical damping for mechanical structures 20 a-d. In this regard,chamber 26 includes fluid 42 that is “trapped”, “sealed” and/orcontained within chamber 26. The state of fluid 42 within chamber 26(for example, the pressure) may be determined using conventionaltechniques and/or using those techniques described and illustrated innon-provisional patent application entitled “Electromechanical Systemhaving a Controlled Atmosphere, and Method of Fabricating Same”, whichwas filed on Mar. 20, 2003 and assigned Ser. No. 10/392,528 (hereinafter“the Electromechanical System having a Controlled Atmosphere PatentApplication”).

The inventions described and illustrated in the Electromechanical Systemhaving a Controlled Atmosphere Patent Application may be implementedwith any and all of the inventions described and illustrated in thisapplication. For example, the encapsulation techniques described abovemay be implemented with techniques described in the ElectromechanicalSystem having a Controlled Atmosphere Patent Application to trap and/orseal a fluid having a selected, desired and/or predetermined statewithin the chamber. In this way, the fluid provides a desired,predetermined, appropriate and/or selected mechanical damping formechanical structures within the chamber.

As another example, the Electromechanical System having a ControlledAtmosphere Patent Application describes a MEMS that includes a pluralityof monolithically integrated micromachined mechanical structures havingone or more electromechanical systems (for example, gyroscopes,resonators, temperature sensors and/or accelerometers). With referenceto FIG. 11A, in one embodiment, MEMS 10 includes a plurality ofmicromachined mechanical structures 12 a-c that are monolithicallyintegrated on or disposed within substrate 14. Each micromachinedmechanical structure 12 a-c includes one or more mechanical structures20 a-p (for the sake of clarity only a portion of which are numbered)that are disposed in chambers 26 a-d.

In certain embodiments, chambers 26 a-d are sealed or encapsulated usingthe techniques described above. The chambers 26 a-d may be sealed orencapsulated in the same or substantially the same manner or usingdiffering techniques. In this way, the plurality of structures 12 a-dmay be fabricated in ways that provide the same, substantially the same,different or substantially different desired, predetermined, appropriateand/or selected mechanical damping for mechanical structures 20 a-p.

Indeed, in at least one embodiment, structure 12 c includes a pluralityof chambers, namely chambers 26 c and 26 d, each containing fluid 42 cand 42 d, respectively. The chambers 22 c and 22 d may be sealed orencapsulated in a manner that fluids 42 c and 42 d, respectively, aremaintained at the same or substantially the same selected, desiredand/or predetermined states. As such, in this embodiment, fluids 42 cand 42 d may provide the same or substantially the same desired,predetermined, appropriate and/or selected mechanical damping formechanical structures 20 h-k and 20 l-p, respectively.

Alternatively, in at least another embodiment, chambers 26 c and 26 dmay be sealed or encapsulated using different or differing techniquessuch that fluids 24 c and 24 d may be “trapped”, “sealed”, maintainedand/or contained in chambers 26 c and 26 d, respectively, at differentor substantially different selected, desired and/or predeterminedstates. In this embodiment, chambers 26 c and 26 d may be “sealed” usingdifferent processing techniques, different processing conditions and/ordifferent materials (for example, gases or gas vapors). As such, afterencapsulation, fluids 42 c and 42 d provide different or substantiallydifferent mechanical damping characteristics for mechanical structures20 h-k and 20 l-p, respectively. In this way, micromachined mechanicalstructure 12 c may include different electromechanical systems (forexample, gyroscopes, resonators, temperature sensors and accelerometers)that require different or substantially different mechanical dampingcharacteristics for optimum, predetermined, desired operation.

For the sake of brevity, all of the inventions described and illustratedin the Electromechanical System having a Controlled Atmosphere PatentApplication will not be repeated here. It is expressly noted, however,that the entire contents of the Electromechanical System having aControlled Atmosphere Patent Application, including for example, thefeatures, attributes, alternatives, materials, techniques and advantagesof all of the inventions, are incorporated by reference herein.

As mentioned above, in one set of embodiments, a monolithic structuremay include mechanical structure 12 and data processing electronics 16and/or interface circuitry 18 that are integrated on or in a commonsubstrate. With reference to FIGS. 12A-12C, MEMS 10 includesmicromachined mechanical structure 12, having structures 20 a-20 d andcontact area 24, as well as data processing electronics 16, includingintegrated circuits 50 disposed in field region 22 b (and/or region 22a—not illustrated). As mentioned above, mechanical structures 20 a-20 d(and contact 24) may be formed from, for example, a single crystallinematerial (FIGS. 12A and 12B) or a polycrystalline material (FIG. 12C).Moreover, contact via or plug 38 may also be formed from, for example,primarily a single crystalline material (FIG. 12B) or a polycrystallinematerial (FIGS. 12A and 12C).

It should be noted that mechanical structure 12 may be electricallyconnected to integrated circuits 50 via low resistance layer 46. Theintegrated circuits 50 may be fabricated using conventional techniques.

In particular, in those instances where contact 24 is accessed directlyby integrated circuitry 50, it may be advantageous to provide a lowresistance electrical path. The insulation layer 48 may be deposited,formed and/or grown and patterned to provide or facilitateinterconnection with contact area 24. Thereafter, a low resistance layer46 (for example, a heavily doped polysilicon or metal such as aluminum,chromium, gold, silver, molybdenum, platinum, palladium, tungsten,titanium, and/or copper) is formed.

There are many inventions described and illustrated herein. Whilecertain embodiments, features, materials, configurations, attributes andadvantages of the inventions have been described and illustrated, itshould be understood that many other, as well as different and/orsimilar embodiments, features, materials, configurations, attributes,structures and advantages of the present inventions that are apparentfrom the description, illustration and claims. As such, the embodiments,features, materials, configurations, attributes, structures andadvantages of the inventions described and illustrated herein are notexhaustive and it should be understood that such other, similar, as wellas different, embodiments, features, materials, configurations,attributes, structures and advantages of the present inventions arewithin the scope of the present invention.

For example, any and all of the embodiments illustrated and describedherein may include multiple layers of mechanical structures, contactsareas and buried contacts that are vertically and/or laterally stackedor interconnected (see, for example, micromachined mechanical structure12 of FIGS. 11B, 11C and 11D). Moreover, single layer and multiplelayers of mechanical structures may be themselves be vertically and/orlaterally stacked or interconnected (see, for example, micromachinedmechanical structure 12 b of FIG. 11A). Further, the resultingmicromachined mechanical structure 12 may be integrated with integratedcircuitry 50 on a common substrate 14. Any vertical and/or laterallocation of micromachined mechanical structure 12, relative tointegrated circuitry 50, may be suitable.

Moreover, with reference to FIG. 13, in those instances where thematerial comprising a second or subsequent encapsulation layer (forexample, second encapsulation layer 28 b) deposits, forms or grows overselected surfaces of the structures in chamber 26 (for example, thesurfaces of mechanical structures 20 a-d and field areas 22 a and 22 b)as chamber 26 is sealed or encapsulated, it may be advantageous todesign and fabricate mechanical structures 20 a-d to account for thedeposition, formation or growth of the additional material. Thethickness of the additional material 28 b′ on the surfaces of mechanicalstructures 20 a-d may be approximately equal to the width or diameter ofvent 36. Accordingly, in one set of embodiments, the design (forexample, thickness, height, width and/or lateral and/or verticalrelation to other structures in chamber 36) of mechanical structures 20a-d incorporates therein such additional material 28 b′ and thefabrication of mechanical structures 20 a-d to provide a final structureincludes at least two steps. A first step which fabricates mechanicalstructures 20 a-d according to initial dimensions (for example, asdescribed above with respect to FIGS. 4A and 4B) and a second step thatincludes the deposition, formation or growth of material 28 b′ as aresult of deposition, formation or growth of at least one encapsulationlayer, for example, second encapsulation layer 28 b and/or subsequentencapsulation layer.

The term “depositing” and other forms (i.e., deposit, deposition anddeposited) in the claims, means, among other things, depositing,creating, forming and/or growing a layer of material using, for example,a reactor (for example, an epitaxial, a sputtering or a CVD-basedreactor (for example, APCVD, LPCVD, or PECVD)).

Further, in the claims, the term “contact” means a conductive region,partially or wholly disposed outside the chamber, for example, thecontact area and/or contact via.

Finally, it should be further noted that while the present inventionshave been described in the context of microelectromechanical systemsincluding micromechanical structures or elements, the present inventionsare not limited in this regard. Rather, the inventions described hereinare applicable to other electromechanical systems including, forexample, nanoelectromechanical systems. Thus, the present inventions arepertinent to electromechanical systems, for example, gyroscopes,resonators, temperatures sensors and/or accelerometers, made inaccordance with fabrication techniques, such as lithographic and otherprecision fabrication techniques, which reduce mechanical components toa scale that is generally comparable to microelectronics.

1. A microelectromechanical device comprising: a chamber; a first layer;a first encapsulation layer comprising a permeable material, whereinfirst encapsulation layer forms at least a portion of a wall of thechamber; a micromechanical structure, wherein: (1) at least a portion ofthe micromechanical structure is formed in and/or from the first layer,and (2) at least a portion of the micromechanical structure is disposedin the chamber; a second encapsulation layer, disposed on the firstencapsulation layer to seal the chamber, wherein the secondencapsulation layer is a semiconductor material and wherein the firstand second encapsulation layers are different from the first layer; anda field region disposed outside and above the chamber, wherein: thefield region includes monocrystalline silicon; the first encapsulationlayer is a semiconductor material; a first portion of the firstencapsulation layer includes monocrystalline silicon and a secondportion of the first encapsulation layer includes a porous or amorphoussilicon; the second portion of the first encapsulation layer is aportion of the wall of the chamber; a portion of the secondencapsulation layer that is on the second portion of the firstencapsulation layer includes polycrystalline silicon.
 2. Amicroelectromechanical device comprising: a chamber; a first layer; afirst encapsulation layer comprising a permeable material, wherein firstencapsulation layer forms at least a portion of a wall of the chamber; amicromechanical structure, wherein: (1) at least a portion of themicromechanical structure is formed in and/or from the first layer, and(2) at least a portion of the micromechanical structure is disposed inthe chamber; a second encapsulation layer, disposed on the firstencapsulation layer to seal the chamber, wherein the secondencapsulation layer is a semiconductor material and wherein the firstand second encapsulation layers are different from the first layer; acontact which is at least partially disposed outside the chamber; and aninsulation layer disposed on at least a portion of the secondencapsulation layer, wherein the insulation layer includes an openingover the contact and wherein the microelectromechanical device furtherincludes a highly electrically conductive layer that is disposed in theopening and on the contact and on at least a portion of the insulationlayer.
 3. A microelectromechanical device comprising: a chamber; a firstlayer; a first encapsulation layer comprising a permeable material,wherein first encapsulation layer forms at least a portion of a wall ofthe chamber; a micromechanical structure, wherein: (1) at least aportion of the micromechanical structure is formed in and/or from thefirst layer, and (2) at least a portion of the micromechanical structureis disposed in the chamber; a second encapsulation layer, disposed onthe first encapsulation layer to seal the chamber, wherein the secondencapsulation layer is a semiconductor material and wherein the firstand second encapsulation layers are different from the first layer; acontact which is at least partially disposed outside the chamber,wherein the contact includes a semiconductor material that is doped withan impurity to increase the electrical conductivity of the contact; aninsulation layer disposed on the second encapsulation layer; and a thirdencapsulation layer disposed on the second encapsulation layer, wherein:the first encapsulation layer includes a plurality of vents formedtherein and a porous polycrystalline silicon or amorphous silicon; thesecond encapsulation layer is disposed in the plurality of vents to sealthe chamber and includes polycrystalline silicon, silicon carbide,silicon/germanium, germanium, and/or gallium arsenide; and the thirdencapsulation layer includes an insulating material.
 4. Amicroelectromechanical device comprising: a chamber; a first layer; afirst encapsulation layer comprising a permeable material, wherein firstencapsulation layer forms at least a portion of a wall of the chamberand includes at least one vent; a micromechanical structure, wherein:(1) at least a portion of the micromechanical structure is formed inand/or from the first layer, and (2) at least a portion of themicromechanical structure is disposed in the chamber; a secondencapsulation layer, disposed on the first encapsulation layer to sealthe chamber, wherein the second encapsulation layer is a semiconductormaterial and wherein the first and second encapsulation layers aredifferent from the first layer; a contact which is at least partiallydisposed outside the chamber; an insulation layer disposed on at leastthe second encapsulation layer that is disposed in and/or on the atleast one vent, wherein the insulation layer includes an opening overthe contact; and a highly electrically conductive layer that is disposedin the opening and on: (i) the contact and (ii) at least a portion ofthe insulation layer; wherein the second encapsulation layer includespolycrystalline silicon.